Geometrical optical model of the image formation in Makyoh (magic-mirror) topography
نویسنده
چکیده
A geometrical optical model for the image formation of Makyoh (or magic-mirror) topography is presented. General relations are given on the optical settings. The basic equations of the imaging are derived. Fundamental features of the imaging are pointed out, and optimum working conditions are established. Simulations of the image of an isolated defect (hillock or depression) and a periodic (sinusoidal) surface are presented for different optical settings. Supporting experimental images are presented.
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Makyoh Topography for the Study of Large-Area Extended Defects in Semiconductors
A quantitative approach to the Makyoh-topography image formation mechanism is presented. General relations are given on the optical settings; geometrical optical simulations of a sinusoidal surface and a hillock (or depression) are presented. Optimum working conditions are established, and general features of the imaging are pointed out. The experimental images taken for Si wafers are compared ...
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